Physics of microfabrication: front end processing

Lectures: 2 sessions / week, 1.5 hours / session

Note: This field changes dramatically every few years. Keeping up with the latest developments is a continuous process.

Anyone considering graduate research or a career in microelectronics or microfabrication.

Exposure to basic concepts covered in 6.152J helpful but not required.

Plummer, James, Michael Deal, and Peter Griffin. Silicon VLSI Technology: Fundamentals, Practice and Modeling. Upper Saddle River, NJ: Prentice Hall, 2000. ISBN: 0130850373.

Paper: maximum length of 20 pages, or

In-Class Presentation (with handouts): 17 minutes, plus 3 minutes for questions/discussion.

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